Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2017, 35 (1), pp.01A114. ⟨10.1116/1.4973905⟩ Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, AVS through the American Institute of Physics, 2017, 35 (1), pp.01A114. ⟨10.1116/1.4973905⟩
Book of abstracts of WODIM 2016 19th Workshop on Dielectrics in Microelectronics (WoDIM) 19th Workshop on Dielectrics in Microelectronics (WoDIM), Jun 2016, Catania, Italy HAL