Stress changes and stability of sputter-deposited Mo/B4C multilayer films for extreme ultraviolet mirrors
- Resource Type
- Journal
- Source
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS ; MAY 2002, 41 5A, p3069-p3075, 7p.- Subject
- Language
- English
- ISSN
- 00214922