Simultaneous Formation of a Metallic Mn Layer and a MnOx/MnSixOy Barrier Layer by Chemical Vapor Deposition at 250 degrees C
- Resource Type
- Journal
- Source
JAPANESE JOURNAL OF APPLIED PHYSICS ; MAY 2013, 52 5, pUNSP 05FA02 3p.- Subject
- Language
- English
- ISSN
- 13474065