Parallel Arrays of Sub-10 nm Aligned Germanium Nanofins from an In Situ Metal Oxide Hardmask using Directed Self-Assembly of Block Copolymers
- Resource Type
- Journal
- Source
CHEMISTRY OF MATERIALS ; SEP 8 2015, 27 17, p6091-p6096, 6p.- Subject
- Language
- English
- ISSN
- 15205002