Interfacial reactions in relation with adhesion failures in Al/TiN/Ti/SiO2 and Al/TiN/Ti/borophosphosilicate glass systems
- Resource Type
- Journal
- Source
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS ; APR 2003, 22 1, p3-p10, 8p.- Subject
- Language
- English
- ISSN
- 12860042