Parallel nanometer scale fabrication. Final report, September 19, 1989--September 14, 1992
- Resource Type
- Technical Report
- Authors
- Source
- Other Information: PBD: Sep 1993
- Subject
- 36 MATERIALS SCIENCE MICROELECTRONIC CIRCUITS
FABRICATION
MILLING
THIN FILMS
PROTEINS
CRYSTAL STRUCTURE
TITANIUM OXIDES
ELECTRON MICROSCOPY
HOLES
PROGRESS REPORT
COMPOSITE MATERIALS
HETEROJUNCTIONS
SUBSTRATES
MASKING 360201
PREPARATION AND FABRICATION
STRUCTURE AND PHASE STUDIES
- Language
- English
Our approach to nanotechnology stresses parallel (as opposed to serial) processing and self-assembly techniques and we have demonstrated a basic parallel nanofabrication process that will enable a wide variety of nanometer-scale structures to be made. The process of nanometer molecular lithography employs two-dimensional biomolecular crystals as patterning elements in the parallel fabrication of structures on the 1--10 nm length scale. We have further demonstrated the fabrication of composite biomolecular/solid state heterostructures of nanometer dimension (nanoheterostructures). We are presently pursuing central issues in the development of nanotechnology such as the understanding and control of fluctuations and structural variations as well as applications of our nanofabrication process. An example of the latter is the formation of porous silicon having monodisperse arrays of silicon ``quantum wires`` to elucidate the role of quantum confinement in the phenomenon of luminescent silicon.