Single Exposure Imaging of Talbot Carpets and Resolution Characterization of Detectors for Micro- and Nano- Patterns
- Resource Type
- Academic Journal
- Authors
- Hyun-su Kim; Serhiy Danylyuk; William S. Brocklesby; Larissa Juschkin
- Source
- Current Optics and Photonics. 2016-04 20(2):245-250
- Subject
- Extreme ultraviolet
Micro-imaging
Nano-structuring
Self-imaging
Talbot effect
- Language
- Korean
- ISSN
- 2508-7266
2508-7274
In this paper, we demonstrate a self-imaging technique that can visualize longitudinal interferencepatterns behind periodically-structured objects, which is often referred to as Talbot carpet. Talbot carpetis of great interest due to ever-decreasing scale of interference features. We demonstrate experimentallythat Talbot carpets can be imaged in a single exposure configuration revealing a broad spectrum ofmulti-scale features. We have performed rigorous diffraction simulations for showing that Talbot carpetprint can produce ever-decreasing structures down to limits set by mask feature sizes. This demonstratesthat large-scale pattern masks may be used for direct printing of features with substantially smaller scales. This approach is also useful for characterization of image sensors and recording media.