Realization of MOEMS pressure sensor using mach zehnder interferometer
- Resource Type
- Article
- Authors
- Sumit Kumar Jindal; Sanjeev Kumar Raghuwanshi; Ajay Kumar
- Source
- Journal of Mechanical Science and Technology, 29(9), pp.3831-3839 Sep, 2015
- Subject
- 기계공학
- Language
- English
- ISSN
- 1976-3824
1738-494X
In this paper we first time realize the all optical pressure sensor using the Mach Zehnder interferometer. In this study, initially a circularshape clamped diaphragm is taken and pressure is applied. The deflection which is maximum at the centre is taken across a potentiometer(POT hereafter) and corresponding output voltage is noted. This voltage is applied across the electrode of Mach Zehnder Interferometer(MZI) and depending upon the specific value of electrode voltage the intensity of the optical signal varies, which provides theproper relation between the applied pressure and normalized intensity of the optical signal. The optical switching phenomena in the MZIstructure can be effectively used as an efficient pressure sensors. The paper includes the suitable expressions for the central deflection ofclamped edge pressure sensor diaphragm, the voltage output by POT and intensity of optical signal for MZI. The results are very effectivelysupported by the use of Solidworks and Opti-BPM. The error for the said parameters is also calculated and it is found in goodagreement with the desired results.