Investigation of slurry flow path to top surface of workpiece in double-sided lapping / 両面研磨における加工物上面への研磨液供給経路の検討
- Resource Type
- Journal Article
- Source
- Proceedings of JSPE Semestrial Meeting. 2023, :783
- Subject
Double-sided lapping Lapping platen Material removal rate Slurry Wafer carrier ウェハキャリア 両面研磨 研磨レート 研磨定盤 研磨液 - Language
- Japanese