Characterization of mechanical properties of nanofilm on porous aluminum / ポーラスアルミナ基板上でのナノフィルムの力学特性評価
- Resource Type
- Journal Article
- Source
- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science. 2020, :113
- Subject
- Language
- Japanese
- ISSN
- 2434-8589