703 AIP法により作製したTiAlN膜の耐摩耗性に及ぼす各種膜特性の影響(OS8-1 表面の機能化と薄膜・トライポロジー(1),OS8 表面の機能化と薄膜・トライポロジー) / 703 Influence of physical properties of thin films on wear resistance of TiAlN films coated by arc-ion plating
- Resource Type
- Journal Article
- Source
- The Proceedings of Conference of Tokai Branch. 2013, :403
- Subject
- Language
- Japanese
- ISSN
- 2424-2748