Advances in nitride film and coating growth by chemical vapor deposition
- Resource Type
- Journal Article
- Source
- JSAP Annual Meetings Extended Abstracts. 2017, :1839
- Subject
5p-S22-2 Aluminum nitride Chemical Vapor Deposition Coating プラズマエレクトロニクス プラズマエレクトロニクス分科内招待講演 - Language
- English
- ISSN
- 2436-7613