The highly charged ion (HCI) possesses potential energy which increases with its charge state. HCIs are considered to be applied to microfabrication, but a HCI beam can be focused only up to mm order by using ordinary electrostatic lens. There is a possibility that a HCI beam can be focused into micro or nano size using a glass capillary. In the present study, we conducted experiments to focus a HCI beam produced by Kobe EBIS using a glass capillary.