Atomic hydrogen irradiation on DLCs and in-situ observation of their surface by XAS / DLCへの原子状水素照射とXAS法による表面のその場観察
- Resource Type
- Journal Article
- Source
- JSAP Annual Meetings Extended Abstracts. 2020, :906
- Subject
8a-Z05-5 Contamination cleaning Soft X-ray absorption spectroscopy atomic hydrogen カーボン系薄膜 原子状水素 汚染物除去 薄膜・表面 軟X線吸収分光 非晶質カーボン薄膜 - Language
- Japanese
- ISSN
- 2436-7613