FIB patterning of dielectric, metallized and graphene membranes: A comparative study
- Resource Type
- Article
- Authors
- Hemamouche, A.; Morin, A.; Bourhis, E.; Toury, B.; Tarnaud, E.; Mathé, J.; Guégan, P.; Madouri, A.; Lafosse, X.; Ulysse, C.; Guilet, S.; Patriarche, G.; Auvray, L.; Montel, F.; Wilmart, Q.; Plaçais, B.; Yates, J.; Gierak, J.
- Source
- In Microelectronic Engineering 1 June 2014 121:87-91
- Subject
- Language
- ISSN
- 0167-9317