AC-coupled n-in-p pixel detectors on MCz silicon with atomic layer deposition (ALD) grown thin film
- Resource Type
- Article
- Authors
- Gädda, A.; Ott, J.; Bharthuar, S.; Brücken, E.; Kalliokoski, M.; Karadzhinova-Ferrer, A.; Bezak, M.; Kirschenmann, S.; Litichevsky, V.; Golovleva, M.; Martikainen, L.; Winkler, A.; Chmill, V.; Tuovinen, E.; Luukka, P.; Härkönen, J.
- Source
- In Nuclear Inst. and Methods in Physics Research, A 11 January 2021 986
- Subject
- Language
- ISSN
- 0168-9002