Precision assembly of a miniaturized wire deflector for electron-beam lithography
- Resource Type
- Article
- Authors
- Risse, Stefan; Damm, Christoph; Hornaff, Marcel; Kamm, Andreas; Mohaupt, Matthias; Eberhardt, Ramona; Schmidt, Ingo; Ramm, Roland; Kühmstedt, Peter; Notni, Gunther; Döring, Hans-Joachim; Elster, Thomas; Kirschstein, Ulf Carsten; Schenk, Christoph
- Source
- In Microelectronic Engineering September 2012 97:100-104
- Subject
- Language
- ISSN
- 0167-9317