Effects of the annealing of amorphous Ta2O5 coatings produced by ion beam sputtering concerning the effusion of argon and the chemical composition
- Resource Type
- Article
- Authors
- Paolone, A.; Placidi, E.; Stellino, E.; Betti, M.G.; Majorana, E.; Mariani, C.; Nucara, A.; Palumbo, O.; Postorino, P.; Rago, I.; Trequattrini, F.; Granata, M.; Teillon, J.; Hofman, D.; Michel, C.; Lemaitre, A.; Shcheblanov, N.; Cagnoli, G.; Ricci, F.
- Source
- In Journal of Non-Crystalline Solids 1 April 2021 557
- Subject
- Language
- ISSN
- 0022-3093