Novel metallization processes for sub-100 nm magnetic tunnel junction devices
- Resource Type
- Article
- Authors
- Cao, Kaihua; Cui, Hushan; Zhang, Youguang; Xiong, Huagang; Wei, Jiaqi; Wang, Lezhi; Cai, Wenlong; Liu, Yizheng; Liu, Pan; He, Xiaobin; Li, Junjie; Bai, Guobin; Yu, Jiahan; Han, Jianghao; Gao, Jianfeng; Jiang, Qifeng; Hu, Yanpeng; Li, Lin; Tang, Bo; Zhang, Yue; Zhang, Peng; Zhang, Qihui; Liu, Shi; Lu, Yihong; Yang, Tao; Li, Junfeng; Radamson, Henry H.; Zhao, Chao; Zhao, Weisheng
- Source
- In Microelectronic Engineering 15 March 2019 209:6-9
- Subject
- Language
- ISSN
- 0167-9317