AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy
- Resource Type
- Article
- Authors
- Walde, S.; Hagedorn, S.; Coulon, P.-M.; Mogilatenko, A.; Netzel, C.; Weinrich, J.; Susilo, N.; Ziffer, E.; Matiwe, L.; Hartmann, C.; Kusch, G.; Alasmari, A.; Naresh-Kumar, G.; Trager-Cowan, C.; Wernicke, T.; Straubinger, T.; Bickermann, M.; Martin, R.W.; Shields, P.A.; Kneissl, M.; Weyers, M.
- Source
- In Journal of Crystal Growth 1 February 2020 531
- Subject
- Language
- ISSN
- 0022-0248