Processing of n+/p−/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates
- Resource Type
- Article
- Source
- In
Nuclear Inst. and Methods in Physics Research, A 21 August 2016 828:46-51 - Subject
GAM - Language
- ISSN
- 0168-9002