High growth rate magnetron sputter epitaxy of GaN using a solid Ga target
- Resource Type
- Article
- Authors
- Pingen, Katrin; Hinz, Alexander M.; Sandström, Per; Wolff, Niklas; Kienle, Lorenz; Scipioni, Larry; Greer, James; von Hauff, Elizabeth; Hultman, Lars; Birch, Jens; Hsiao, Ching-Lien
- Source
- In Vacuum February 2024 220
- Subject
- Language
- ISSN
- 0042-207X