Carbon ion implantation as healing strategy for improved reliability in phase-change memory arrays
- Resource Type
- Article
- Authors
- Bourgeois, G.; Meli, V.; Al Mamun, F.; Mazen, F.; Nolot, E.; Martinez, E.; Barnes, J.-P.; Bernier, N.; Jannaud, A.; Laulagnet, F.; Hemard, B.; Castellani, N.; Bernard, M.; Sabbione, C.; Milesi, F.; Magis, T.; Socquet-Clerc, C.; Coig, M.; Garrione, J.; Cyrille, M.-C.; Charpin, C.; Navarro, G.; Andrieu, F.
- Source
- In Microelectronics Reliability November 2021 126
- Subject
- Language
- ISSN
- 0026-2714