Semi-active vibration control for SCARA robot using magnetorhelogical damper
- Resource Type
- Conference
- Authors
- Zhihai Li; Zhenwei Wu; Jing Cui
- Source
- Proceeding of the 11th World Congress on Intelligent Control and Automation Intelligent Control and Automation (WCICA), 2014 11th World Congress on. :6133-6138 Jun, 2014
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Shock absorbers
Joints
Vibrations
Robot kinematics
Elasticity
Torque
- Language
For smooth operation of SCARA robot for wafer transition, a new method using magenetorhelogical damper for vibration suppression is proposed. Vibration often occurs when the acceleration decrease or increase abruptly. Especially in the end of an operation period, the residual vibration decreases the safety of wafer operation and extends settling time. Firstly, Vibration sources are analyzed. And dynamics model of robot joint considering elasticity is established. Magenetorhelogical damper is introduced into joint structure to realize vibration suppression by physical mean. It could provide a reliable suppression effectiveness. Control structure of joint with elasticity and MR damper is discussed. A PD controller is applied into joint motion control to a desired movement. Frequency characteristics of the joint with MR damper are analyzed. Finally, a simulation is implemented to verify the effectiveness of the proposed method.