Scalable on-chip lasers grown on 300 mm Si wafers
- Resource Type
- Conference
- Authors
- Shang, Chen; Feng, Kaiyin; Hughes, Eamonn T.; Clark, Andrew; Debnath, Mukul; Koscica, Rosalyn; Leake, Gerald; Herman, Joshua; Harame, David; Ludewig, Peter; Wan, Yating; Bowers, John E.
- Source
- 2023 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2023 Conference on. :1-2 May, 2023
- Subject
- Photonics and Electrooptics
Performance evaluation
Quantum dot lasers
Surface emitting lasers
Photonic crystals
Quantum well lasers
Laser excitation
Silicon
(230.5590) Quantum-well-wire and -dot devices
(140.5960) Semiconductor lasers
(160.3130) Integrated optics materials
- Language
We report the first electrically pumped InAs quantum-dot lasers grown on Si within narrow oxide pockets for monolithic on-chip light sources. High performance devices are achieved at 300 mm wafer scale with high yields.