Chip-Scale Digital Mid-Infrared Computational Spectrometer Powered by MEMS Technology
- Resource Type
- Conference
- Authors
- Sun, Haoyang; Qiao, Qifeng; Zhou, Guangya
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1465-1468 Jun, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Micromechanical devices
Transducers
Numerical analysis
Scalability
Couplers
Voltage
Sensor phenomena and characterization
Silicon photonics MEMS
on-chip computational spectrometer
digitalized
scalability
- Language
- ISSN
- 2167-0021
This paper reports an advanced mid-infrared (Mid-IR) chip-scale digital MEMS-enabled computational spectrometer (d-McS) through controlling multi-stage cascaded MEMS waveguide couplers. The MEMS waveguide couplers are operated in digital on/off mode, thus making the device immune to driving voltage noise and robust for on-chip field sensing applications. Our proposed spectrometer is compact and exhibits an average spectral resolution of 9.4 nm in the 3.7 to 4.1 μm wavelength range. Benefitting from good scalability, the spectral resolution can be further improved easily by increasing the number of waveguide coupler stages.