High-Performance Thin-Film Lithium Niobate Mach-Zehnder Modulator on 8-Inch Silicon Substrate
- Resource Type
- Conference
- Authors
- Zhou, Jingjie; Cong, Qingyu; Lv, Liming; Yao, Zhanshi; Zhu, Shiyang; Wang, Yuxi; Li, Zhaoyi; Fan, Zuowen; Zeng, Xianfeng; Hu, Ting; Jia, Lianxi
- Source
- 2024 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2024. :1-3 Mar, 2024
- Subject
- Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Mach-Zehnder interferometers
Performance evaluation
Lithium niobate
Modulation
Photonic integrated circuits
Electro-optic modulators
Silicon
- Language
We first report the thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulator (MZM) on an 8-inch silicon substrate fabricated in the back-end-of-line (BEOL) of CMOS foundry. It operates at 1550 nm with electro-optical response of only 1.5 dB roll-off at 67 GHz.