This work reports the high performance micro-thermoelectric generators (TEGs) based on metal-doped electrochemical deposition. Ultra-thick (2 mm-thick) and compact electrodeposited thermoelectric material have been successfully synthesized with high Seebeck coefficient $\sim -143\ \mu \mathrm{V}/\mathrm{K}$, high electrical conductivity ∼970 S/cm and low thermal conductivity ∼ 0.6 W/mK. As the result, the performance shows Figure of merit $ZT=1$ at room temperature, which is one of key factor for high performance TEG. Two kinds of TEG including pure Bi 2 Te 3 and metal doped Bi 2 Te 3 were fabricated, evaluated and compared.