Test standard for light, electron and microwave microscopy to enable robotic processes
- Resource Type
- Conference
- Authors
- Haenssler, Olaf C.; Kostopoulos, A.; Doundoulakis, G.; Aperathitis, E.; Fatikow, S.; Kiriakidis, G.
- Source
- 2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Manipulation, Automation and Robotics at Small Scales (MARSS), 2017 International Conference on. :1-5 Jul, 2017
- Subject
- Robotics and Control Systems
Scanning electron microscopy
Standards
Microwave imaging
Microwave theory and techniques
Calibration
Microwave measurement
scanning electron microscopy
scanning microwave microscopy
e-beam evaporation
micro capacitances
hybrid microscopy
visual servoing
nanorobotics
- Language
We report on a test standard for different microscopic techniques combined onto one substrate. The patterns of the test standard are recognizable by image processing routines to provide robotic navigation inside Scanning Electron Microscopes. Here it can be used for high-resolution and astigmatism testing. In the center of this standard is a pattern of three different micro capacitance values. This enables high frequency calibration with a Vector Network Analyzer (VNA), one core element of Scanning Microwave Microscopes.