MEMS Scanning Grating Based Compact Diffuse Reflectance Spectroscopic Module for Skin Analysis
- Resource Type
- Conference
- Authors
- Jeon, Jaehun; Park, Jung-Woo; Kim, Gi Beom; Jeong, Ki-Hun
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :338-341 Jun, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Micromechanical devices
Transducers
Diffraction
Light emitting diodes
Diffraction gratings
Skin
Sensor systems
Microelectromechanical system
Diffuse reflectance spectroscopy
Scanning Grating
Microspectrometer
- Language
- ISSN
- 2167-0021
Diffuse reflectance spectroscopy (DRS) allows non-invasive and rapid skin analysis. Here we report a compact DRS module using MEMS (Micro-Electro-Mechanical Systems) scanning grating for on-demand skin analysis. The module comprises LEDs (Light Emitting Diode) and microspectrometer with scanning grating. The DRS module detects the diffused light from LEDs with a photodiode by scanning the diffraction grating. The DRS module is fully packaged by mounting LED sources besides the entrance slit of the microspectrometer and has a spectral response range of 400 nm to 1,000 nm with a spectral resolution of 5.4 nm. This compact module can facilitate on-demand skin analysis.