Robust High-G Microaccelerometers with Mechanical Low-Pass Filters and Electrical ROIC
- Resource Type
- Conference
- Source
- 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024
- Subject
General Topics for Engineers Accelerometers Semiconductor device measurement Sensitivity Measurement units Electric shock Piezoresistive devices Low-pass filters high-G shock measurement unit (SMU) cross-symmetric accelerometer core chip mechanical low-pass filter electrical saturation-free ROIC - Language
- ISSN
- 2377-3480