Chip based wide range planar optical spectrometer
- Resource Type
- Conference
- Authors
- Chang, Chia-Jung; Hsu, Chih Hao; Lee, Horn-Chin; Chang, Heng Chung; Lin, Jing-Yuan
- Source
- 2019 14th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2019 14th International. :173-176 Oct, 2019
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineering Profession
Power, Energy and Industry Applications
Robotics and Control Systems
Mirrors
Cavity resonators
Interference
Optical filters
Fabry-Perot
Electrostatics
Optical interferometry
- Language
- ISSN
- 2150-5942
This paper proposed a micro-optical wavelength splitting element, which is controlled by the length of the Fabry-Perot optical cavity to select the wavelength range of the required interference filtering, and by means of a microactuator. Make a planar chip based optical spectrometer with ultra small in size and more suitable for developing into customer end product.