Fabrication and characterization of nanostructured HfO2 powder and ultra-thin films
- Resource Type
- Conference
- Authors
- de Moraes Cavalcante, Fabio Henrique; Jose, Maria; Gomes, Ribeiro; Soares, Jose Carvalho; Carbonari, Artur Wilson; de Abreu Rosseto, Daniel; Dias Pereira, Luciano Fabricio; Mestnik-Filho, Jose; Saxena, Rajendra Narain; Mitani, Solange Eiko; de Andrade, Leandro Hostalacio Freire
- Source
- 2009 9th IEEE Conference on Nanotechnology (IEEE-NANO) Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on. :904-906 Jul, 2009
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fabrication
Hafnium oxide
Powders
Nanoparticles
Transistors
Probes
Electric variables measurement
Volume measurement
Nuclear measurements
Spectroscopy
component
thin films
electron beam evaporation
pulsed-laser-ablation
perturbed angular correlation
- Language
- ISSN
- 1944-9399
1944-9380
In this work, we report the fabrication process of nanostrutured powder using a Sol-Gel method and HfO 2 nanofilms obtained via Pulsed-Laser-Ablation and Electron-Beam Evaporation. The results of the investigation of structural properties and defects of HfO 2 nanoparticles and thin films are discussed in terms of the electric quadrupole interactions of the nuclear probe 181 Ta within the sample volume measured by the perturbed angular correlation spectroscopy.