Design and characterization of integrated passive elements on high ohmic silicon
- Resource Type
- Conference
- Authors
- Valletta, E.; Van Beek, J.; Den Dekker, A.; Pulsford, N.; Jos, H.F.F.; de Vreede, L.C.N.; Nanver, L.K.; Burghartz, J.N.
- Source
- IEEE MTT-S International Microwave Symposium Digest, 2003 Microwave symposium digest Microwave Symposium Digest, 2003 IEEE MTT-S International. 2:1235-1238 vol.2 2003
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Silicon
Coplanar waveguides
Impedance matching
Substrates
Millimeter wave technology
Coplanar transmission lines
Transmission line theory
Distributed parameter circuits
Radio frequency
Microwave technology
- Language
- ISSN
- 0149-645X
This work presents ultra low-loss coplanar waveguides and Marchand type baluns implemented in an optimized high ohmic silicon substrate technology for RF/microwave applications. The CPW configured baluns operate from 15 to 25 GHz with a minimum insertion loss of 0.8 dB at center frequency.