Dual-wavelength Phase-tilting Iteration and Local Time-shifting Least Squars for Dual-channel Dynamic White-light Inteferometry
- Resource Type
- Conference
- Authors
- Duan, Minaliang; Zong, Yi; Lu, Zhenvu; Li, Jianxin
- Source
- 2024 12th International Conference on Intelligent Control and Information Processing (ICICIP) Intelligent Control and Information Processing (ICICIP), 2024 12th International Conference on. :189-194 Mar, 2024
- Subject
- Aerospace
Bioengineering
Communication, Networking and Broadcast Technologies
Computing and Processing
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Vibrations
Semiconductor device measurement
Heuristic algorithms
Interference
Vibration measurement
Semiconductor device manufacture
Numerical simulation
white-light interferometry
vibration extraction
interferometric signal demodulation
- Language
- ISSN
- 2835-9577
The growing interest in microprofile measurements for advanced semiconductor manufacturing and electronic glass screens has stimulated the demand for in situ dynamic white-light interferometry. However, it is challenging to perform vibration-insensitive measurements because of the broad-spectrum interference. In this article, we report a dual-wavelength phase-tilting iteration (DPTI) algorithm and local time-shifting (LTS) least squares algorithm for dual-channel dynamic white-light interferometry to extract the vibration information and recover the tested profile, respectively. The numerical simulations and comparative experiments were conducted and have shown high accuracy and reliability of the proposed method.