Microfabrication, assembly, and hermetic packaging of mm-sized free-floating neural probes
- Resource Type
- Conference
- Authors
- Yeon, P.; Gonzalez, J. L.; Zia, M.; Rajan, S. Kochupurackal; May, G. S.; Bakir, M. S.; Ghovanloo, M.
- Source
- 2017 IEEE Biomedical Circuits and Systems Conference (BioCAS) Biomedical Circuits and Systems Conference (BioCAS), 2017 IEEE. :1-4 Oct, 2017
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Wireless communication
Micromachining
Packaging
Free-floating wireless implantable neural recording
biocompatibility
distributed neural interfacing
micromachining
hermetic packaging
inductive link
- Language
In this paper, we present a new micromachining (MEMS) fabrication process, microassembly, and hermetic packaging of free-floating neural probes (