Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage
- Resource Type
- Conference
- Authors
- Preston, Daniel J.; Anders, Ariel; Barabadi, Banafsheh; Tio, Evelyn; Zhu, Yangying; Dai, DingRan Annie; Wang, Evelyn N.
- Source
- 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on. :769-772 Jan, 2017
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Contacts
Dielectrics
Copper
Electrodes
Solid modeling
Liquids
- Language
We demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately ±1° while eliminating solid-solid contact. The range and resolution can be readily improved via higher base contact angle and lower contact angle hysteresis as indicated by the detailed modeling accompanying the experimental demonstration.