High-Performance All-Solid-State Micro-Supercapacitor by Using Oxygen Plasma Treatement on LiPON Electrolyte
- Resource Type
- Conference
- Authors
- Wang, Jian; Ma, Yao; Zhu, Liyan; Huang, Xiaodong
- Source
- 2023 International Symposium on Micro-NanoMehatronics and Human Science (MHS) Micro-NanoMehatronics and Human Science (MHS), 2023 International Symposium on. :1-4 Nov, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
- Language
- ISSN
- 2474-3771
This work presents a new strategy to prepare high-performance all-solid-state micro-supercapacitors (ASSMSC). It is found that oxygen plasma treatment on the surface of LiPON is effective to reduce the nitrogen content and lead to the Li 2 O formation near the surface, which is quite helpful to improve LiPON/electrode interface and electrochemical performance of ASSMSC. The treated ASSMSC is experimentally demonstrated to obtain higher specific capacitance (~15.4 mF cm -2 vs. 9.0 mF cm -2 at 0.5 μA cm -2 ), longer cycling retention (~94.7% of the retained capacity after 15000 cycles vs. 84.2%), and higher energy density (~36.0 μWh cm -2 vs. 21.0 μWh cm -2 ) than the untreated one.