EFA Method of AA-Bridge-Type-Defect of SONOS NOR flash
- Resource Type
- Conference
- Authors
- Zhang, Qingwen; Zeng, Zhimin; Zhang, Yuxiang; Wu, Yuan; Zhou, Chenjie
- Source
- 2019 China Semiconductor Technology International Conference (CSTIC) China Semiconductor Technology International Conference (CSTIC), 2019. :1-4 Mar, 2019
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Power, Energy and Industry Applications
AA Bridge
EFA
SONOS
Bitmap
- Language
SONOS is a widely used nonvolatile memory structure. The failure analysis of memory corresponding to this structure is also very important. Among the many kinds of defects, active area bridge is the most difficult to locate. In this paper, we summarize EFA phenomena and failure models of AA bridge.