Sustainable manufacturing process for wafer-scale uniform semiconductor nanostructures
- Resource Type
- Conference
- Authors
- Kim, You Jin; Shin, Sang-Ho; Zhao, Zhi-Jun; Jeong, Jun-Ho; Kim, Munho
- Source
- 2022 IEEE 22nd International Conference on Nanotechnology (NANO) Nanotechnology (NANO), 2022 IEEE 22nd International Conference on. :435-438 Jul, 2022
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Printing
Scalability
Metals
Semiconductor nanostructures
Silicon
Photodetectors
Temperature control
- Language
- ISSN
- 1944-9380
In this paper, we report the direct chemisorption-assisted nanotransfer method based on the melting point lowering effect. This transfer method provides the efficient transfer printing of metal template layers onto 6-in wafer scale with excellent uniformity without using chemical adhesive layers. We further demonstrate the fabrication of silicon nanowire photodetectors with high aspect ratio by metal assisted chemical etching. Our results provide an unprecedented nanofabrication approach for next-generation applications such as energy harvesting, optoelectronics, and photonic devices.