Experimental Investigation of Piezo-actuated Jet Dispensing Via a Flexible Hinge Displacement Amplifier
- Resource Type
- Conference
- Authors
- Ning, Jia; Hu, Hong; Chen, Jian; Yuan, Xiaojian
- Source
- 2019 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Advanced Intelligent Mechatronics (AIM), 2019 IEEE/ASME International Conference on. :1613-1618 Jul, 2019
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
General Topics for Engineers
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Fasteners
Piezoelectric actuators
Bridges
Force
Ceramics
Hysteresis
Finite element analysis
stacked piezoelectric actuators
dispensing
FHDA
- Language
- ISSN
- 2159-6255
Piezo-actuated drop-on-demand jet dispensing technology is an essential method to distribute precision volume liquid in many processes of microelectronic packaging. To meet up the fast development of microelectronic packaging in the last decade and to facilitate producing efficiency, fluid dispensing has shown clear trend in its faster speed, smaller dispensing volume. This paper proposes a type of flexible hinge displacement amplifier (FHDA) for micro-displacement amplification of a piezo-actuator to realize high-frequency jetting dispensing. The article analyzes the influence of each parameter on the amplification ratio through ANSYS simulation, and gives the influence of each parameter on the input and output stiffness. Based on the proposed flexible hinge displacement amplifier, a piezo-actuated jet dispensing experimental mechanism and control system were built up in our lab. The performance of the piezo-actuator and the performance of flexible hinge displacement amplifier were tested.