A MEMS Reconfigurable Air-Spaced Metamaterial Enabled Dynamic Terahertz Beam Steering
- Resource Type
- Conference
- Authors
- Sun, Zhenci; Liang, Chao; Mei, Ziqi; Zhou, Enze; Xie, Rongbo; You, Rui; Bian, Xiaomeng; Zhao, Xiaoguang; Zhao, Jiahao
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1114-1117 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Wireless communication
Beam steering
Space technology
Modulation
Metamaterials
Silicon
MEMS reconfigurable metamaterial
tunable air gap
metallic resonator array
terahertz beam steering
- Language
- ISSN
- 2160-1968
This paper reports a microelectromechanical system (MEMS) reconfigurable metamaterial based dynamic terahertz beam deflector enabled by changing the ultra-subwavelength air gap between the metallic resonator array and Au ground plane. In comparison to terahertz tunable metamaterials based on modifying the constituent material properties, our MEMS-based devices can improve THz beam steering efficiency and the modulation depth of deflection coefficient. The device was fabricated by a combination of the surface and bulk silicon micromachining processes. The MEMS reconfigurable air-spaced metamaterial (ASM) demonstrated may potentiate various applications, such as the next-generation wireless communication and space technology.