Crosstalk Reduction in Silicon-on-Insulator Waveguides for Dense Integration
- Resource Type
- Conference
- Authors
- Song, Shijie; Wu, Chujun; Yi, Xiaoke; Minasian, Robert
- Source
- 2021 IEEE Asia-Pacific Microwave Conference (APMC) Microwave Conference (APMC), 2021 IEEE Asia-Pacific. :76-78 Nov, 2021
- Subject
- Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Integrated optics
Strips
Semiconductor device measurement
Optical device fabrication
Crosstalk
Silicon-on-insulator
Optical variables measurement
Optical waveguide
photonic integrated circuit
silicon photonics
LIDAR
- Language
We present optimized silicon-on-insulator (SOI) waveguides with strip-based optical barriers to simultaneously achieve low crosstalk for dense photonic integration and high feasibility for scale-up fabrication. The impact of fabrication variances on the crosstalk reduction performance is investigated. Experimental results demonstrate a crosstalk reduction of around 20 dB across a full measurement spectral range of 90 nm in fabricated coupled SOI waveguides with an edge-to-edge spacing of 670 nm, while having a sidewall angle slope tolerance of 5° and a strip width variation of 20 nm.