A Mode-localized Resonant Accelerometer Based on A Novel Micro-lever Coupler Resistant to Manufacture Process Defects
- Resource Type
- Conference
- Authors
- Wang, Bowen; Wang, Kunfeng; Wang, Zheng; Xiong, Xinyin; Zhai, Zhaoyang; Yang, Wuhao; Zou, Xudong
- Source
- 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024
- Subject
- General Topics for Engineers
Couplings
Fabrication
Accelerometers
Sensitivity
Manufacturing processes
Silicon-on-insulator
Couplers
mode-localized
accelerometer
coupler
manufacture process defects
- Language
- ISSN
- 2377-3480
The mode-localized resonant accelerometer (ML-RXL) described in this study is developed with a unique micro-level mechanical coupling mechanism that protects it from manufacturing process defects and ensures that the coupling stiffness of fabrication is the same as desired value.