Layout-Aware Yield Prediction of Photonic Circuits
- Resource Type
- Conference
- Authors
- Bogaerts, Wim; Khan, Umar; Xing, Yufei
- Source
- 2018 IEEE 15th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2018 IEEE 15th International Conference on. :1-2 Aug, 2018
- Subject
- Photonics and Electrooptics
Integrated circuit modeling
Semiconductor device modeling
Fabrication
Photonics
Sensitivity
Lattices
Monte Carlo methods
- Language
- ISSN
- 1949-209X
We demonstrate yield prediction of silicon wavelength filters using layout-aware Monte-Carlo circuit simulations. Maps of wafer and die-level variability of width and thickness are projected onto circuit layout and translated into circuit model parameters. We apply this onto Mach-Zehnder lattice filters with different filter orders.