A flexible, low-cost, high performance SiGe:C BiCMOS process with a one-mask HBT module
- Resource Type
- Conference
- Source
- Digest. International Electron Devices Meeting, Electron devices meeting Electron Devices Meeting, 2002. IEDM '02. International. :783-786 2002
- Subject
Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Photonics and Electrooptics BiCMOS integrated circuits Heterojunction bipolar transistors CMOS technology CMOS process Implants Artificial intelligence Lithography Fabrication Silicon germanium Germanium silicon alloys - Language