Suppression of Noise in SEM Images Using Adaptive Anisotropic Partial Differential Equations*
- Resource Type
- Conference
- Authors
- Pang, Shuiquan; Wu, Shihuang; Wang, Zhizhe; Luo, Jun; Zhang, Qiuzhen
- Source
- 2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Manipulation, Automation and Robotics at Small Scales (MARSS), 2023 International Conference on. :1-6 Oct, 2023
- Subject
- Bioengineering
Robotics and Control Systems
Automation
Numerical analysis
Partial differential equations
Noise reduction
Robots
- Language
This paper proposes a denoising method based on the adaptive anisotropic partial differential equations (AAPDE) for SEM images. The proposed method adaptively selects the denoising parameters of different regions based on the gradient amplitude of SEM images, which effectively solves the problem of global parameters not being applicable to local regions of the image. Experimental results show that the proposed method has a better denoising effect than the global denoising methods.