Using in-line film measurement as a proxy for device matching to speed up process change qualification
- Resource Type
- Conference
- Authors
- Chienfan Yu; Van Roijen, Raymond; Shah, Shailesh; Woodard, Eric; Ayala, Javier; Sziklas, Edward
- Source
- 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI. :245-247 May, 2014
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Strips
Qualifications
Semiconductor device measurement
Implants
Time measurement
Monitoring
Process control
device matching
in-line measurements
screen oxide
process change qualification
- Language
- ISSN
- 1078-8743
2376-6697
We describe two cases where we were able to use in-line macro measurement data to pre-select processes and to do necessary adjustments to prospect matching devices for process qualification. This approach dramatically shortens the time for new process qualification.