Heterogeneous and multi-level integration on mature 25Gb/s silicon photonic platform
- Resource Type
- Conference
- Source
- 2017 IEEE CPMT Symposium Japan (ICSJ) CPMT Symposium Japan (ICSJ), 2017 IEEE. :223-226 Nov, 2017
- Subject
Bioengineering Components, Circuits, Devices and Systems Computing and Processing Engineered Materials, Dielectrics and Plasmas Silicon Optical waveguides Photonics Couplers Silicon nitride Optical device fabrication Surface waves Silicon Photonics Process integration 3D integration Edge Coupling Silicon Nitride platform - Language
- ISSN
- 2475-8418