Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations
- Resource Type
- Conference
- Authors
- Tsukamoto, Takashiro; Forke, Roman; Weidlich, Sebastian; Bulz, Daniel; Shaporin, Alexey; Hiller, Karla; Tanaka, Shuji
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :899-902 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Temperature measurement
Frequency modulation
Sensitivity
Shape
Particle separators
Resonant frequency
IP networks
Mode localization
Eigenmode separation and superposition
Mode separator
- Language
- ISSN
- 2160-1968
This paper reports on a mode-localized sensor that uses superposed in-phase (IP) and anti-phase (AP) oscillation modes. The IP/AP mode separator was developed to control these modes simultaneously, even when these modes overlap. The modal-shape (amplitude ratio) detection method using the interference signals between AP and IP control loops is proposed and demonstrated. The IP and AP modal shapes as well as resonant frequencies were simultaneously detected, which means the proposed system can also be used as a frequency modulation (FM) sensor.